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Proceedings Paper

Rapid prototyping using excimer laser microfabrication system
Author(s): Ashok Krishnan; Raja Nassar
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Paper Abstract

To demonstrate proof of concept and obtain faster turnaround times on prototype development, an integrated excimer laser microfabrication system can be used for direct drawing-to- production of photoablated microstructures. A system currently in use consists of excimer lasers (248 nm and 351 nm), high- resolution stages, CAD system, and a visual observation and real-time metrology system. The material for the process is selected depending on the required edge wall definition, aspect ratio, surface roughness, and debris formation and ablation threshold. If the material is already defined, then the best process is found by selecting the following parameters: (1) machining feedrate, (2) laser pulse characteristics, (3) beam defocus, (4) number of passes, (5) laser aided cleaning, (6) high velocity gas cleaning, (7) vacuum machining. Some of the structures fabricated include microtube holders incorporating snap-fasteners for click-on microassembly. Where necessary, laser ablation is complemented by other micromachining processes like micromilling.

Paper Details

Date Published: 1 September 1998
PDF: 12 pages
Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); doi: 10.1117/12.324082
Show Author Affiliations
Ashok Krishnan, Louisiana Tech Univ. (United States)
Raja Nassar, Louisiana Tech Univ. (United States)


Published in SPIE Proceedings Vol. 3512:
Materials and Device Characterization in Micromachining
Craig R. Friedrich; Yuli Vladimirsky, Editor(s)

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