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Proceedings Paper

Novel technique to measure thermal conductivity of thin film membranes
Author(s): Andrea Irace; Pasqualina M. Sarro
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Paper Abstract

In this paper we present a novel technique to measure the thermal conductivity of thin film membranes. A very simple structure consisting of a polysilicon resistor as a heater and a polysilicon-aluminum thermocouple as a temperature sensor, both placed on a SiN membrane, is needed. Next to characterize the thermal conductivity of the SiN thin film, we have also been able to measure the thermal conductivity of SiO and polysilicon thin layers deposited onto the SiN membrane. The results obtained are in good agreement with previously published data obtained with different techniques.

Paper Details

Date Published: 1 September 1998
PDF: 7 pages
Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); doi: 10.1117/12.324081
Show Author Affiliations
Andrea Irace, Univ. degli Studi di Napoli Federico II (Italy)
Pasqualina M. Sarro, Technische Univ. Delft (Netherlands)


Published in SPIE Proceedings Vol. 3512:
Materials and Device Characterization in Micromachining
Craig R. Friedrich; Yuli Vladimirsky, Editor(s)

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