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Proceedings Paper

Microfabrication of high-aspect-ratio Bi-Te alloy microposts and applications in microsized cooling probes
Author(s): Lei Huang; Wanjun Wang; Michael C. Murphy
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Paper Abstract

High aspect-ratio microposts of bismuth-telluride alloy with a height of up to 750 micrometer and a diameter of 150 micrometer have been fabricated with the LIGA technique. This work is the part of an on-going research effort to develop a microprobe based on Peltier effect for highly localized temperature manipulation on the microscale. Bismuth-telluride alloys were electrodeposited galvanostatically on a titanium substrate using an acidic solution containing Bi3+ and HTeO2- ions in 1 mol dm-3 nitric acid (pH equals 0). The Bi-Te alloy microposts were found to be monophasic, exhibit a polycrystalline structure, demonstrate excellent adhesion on the substrate and with good mechanical strength. The chemical composition of the microposts was dependent on the electrolyte composition of deposition bath and the current density used in the electroplating; by controlling these two factors either p- or n-type Bi-Te alloy microposts may be produced. This research demonstrates that the microfabrication of Peltier effect probes is feasible.

Paper Details

Date Published: 1 September 1998
PDF: 8 pages
Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); doi: 10.1117/12.324076
Show Author Affiliations
Lei Huang, Louisiana State Univ. (United States)
Wanjun Wang, Louisiana State Univ. (United States)
Michael C. Murphy, Louisiana State Univ. (United States)

Published in SPIE Proceedings Vol. 3512:
Materials and Device Characterization in Micromachining
Craig R. Friedrich; Yuli Vladimirsky, Editor(s)

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