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Proceedings Paper

A hinged-pad test structure for sliding friction measurement in micromachining
Author(s): Maarten P. de Boer; James M. Redmond; Terry A. Michalske
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Paper Abstract

We describe the design, modeling, fabrication and initial testing of a new test structure for friction measurement in MEMS. The device consists of a cantilevered forked beam and a friction pad attached via a hinge. Compared to previous test structures, the proposed structure can measure friction over much larger pressure ranges, yet occupies one hundred times less area. The placement of the hinge is crucial to obtaining a well-known and constant pressure distribution in the device. Static deflections on the device were measured and modeled numerically. Preliminary results indicate that friction pad slip is sensitive to friction pad normal force.

Paper Details

Date Published: 1 September 1998
PDF: 10 pages
Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); doi: 10.1117/12.324066
Show Author Affiliations
Maarten P. de Boer, Sandia National Labs. (United States)
James M. Redmond, Sandia National Labs. (United States)
Terry A. Michalske, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 3512:
Materials and Device Characterization in Micromachining
Craig R. Friedrich; Yuli Vladimirsky, Editor(s)

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