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Proceedings Paper

Microtribiology and self-lubrication microsystems
Author(s): Yangchao Tian; Gang Liu; Yilin Hong; Shaojun Fu; Yiguan Hu
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Paper Abstract

The microtribology phenomena on the micro contact (or slide) surface, where the effects of surface forces are more significant than those of gravity, is very different with the conventional machine. The friction force that works on a friction face of a microsystems is significantly high relative to the size of the machine, the fluid lubrication in the conventional size mechanical parts cannot reduce the friction force on the microsystems, the solid lubrication (self- lubrication) should be applied to reduce the friction force. In this paper, the solid lubrication MoS2 was studied. MoS2 is embedded into the Ni structure in electroforming process. The results show that MoS2 can be used as the solid lubrication in the microsystems to reduce the friction force and enhance the hardness of microsystem.

Paper Details

Date Published: 1 September 1998
PDF: 5 pages
Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); doi: 10.1117/12.324065
Show Author Affiliations
Yangchao Tian, Univ. of Science and Technology of China (China)
Gang Liu, Univ. of Science and Technology of China (China)
Yilin Hong, Univ. of Science and Technology of China (China)
Shaojun Fu, Univ. of Science and Technology of China (China)
Yiguan Hu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 3512:
Materials and Device Characterization in Micromachining
Craig R. Friedrich; Yuli Vladimirsky, Editor(s)

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