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Proceedings Paper

Noncontact microtorque measurement for motors in MEMS
Author(s): Yihui Wu; Hongguang Jia; Tongyu Wang; Li-Ding Wang
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Paper Abstract

An important performance criterion for practicable microactuators is the value of output torque. For the torque to be measured is very small, the influence of frictional force and other factors on testing are difficult avoided. So a new noncontact and direct experimental method was proposed, the basic theory and a simple and low-cost design of the measuring instrument is described in this paper. The testing range of shaft torque is from 10-4Nm to 10-7.

Paper Details

Date Published: 1 September 1998
PDF: 6 pages
Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); doi: 10.1117/12.324057
Show Author Affiliations
Yihui Wu, Changchun Institute of Optics and Fine Mechanics (China)
Hongguang Jia, Changchun Institute of Optics and Fine Mechanics (China)
Tongyu Wang, Changchun Institute of Optics and Fine Mechanics (China)
Li-Ding Wang, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 3512:
Materials and Device Characterization in Micromachining
Craig R. Friedrich; Yuli Vladimirsky, Editor(s)

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