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Proceedings Paper

Electroplated and screen-printed magnetic materials applicable to micromachined magnetic devices
Author(s): Jae Yeong Park; Mark G. Allen
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Paper Abstract

In this research, electroplated magnetically isotropic and anisotropic soft alloys and screen-printed soft ferrites applicable to micromachined micromagnetic devices are fabricated and characterized using in-situ measurement techniques. Appropriate magnetic materials and deposition methods, such as electroplating and screen-printing techniques, are examined and material test structures are fabricated. Following material characterization, micromachined inductors with three-dimensional structure are fabricated to determine the usefulness of the magnetic materials and deposition methods. The micromachined inductor is a key component and geometry for realizing micromagnetic devices such as amplifiers, filters, sensors, and actuators. Three different material types are studied in this work. Electroplated magnetically isotropic soft alloys, permalloy (Ni80Fe20), orthonol (Ni50Fe50), and amorphous cobalt-iron- copper (CoFeCu) alloys, are studied, followed by electroplated magnetically anisotropic soft alloys of permalloy (Ni80Fe20) and supermalloy (NiFeMo), which have magnetically easy and hard axes. Finally, screen-printed polymers filled with soft ferrite (NiZn and MnZn) powders, are fabricated and characterized.

Paper Details

Date Published: 1 September 1998
PDF: 14 pages
Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); doi: 10.1117/12.324051
Show Author Affiliations
Jae Yeong Park, Georgia Institute of Technology (United States)
Mark G. Allen, Georgia Institute of Technology (United States)

Published in SPIE Proceedings Vol. 3512:
Materials and Device Characterization in Micromachining
Craig R. Friedrich; Yuli Vladimirsky, Editor(s)

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