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Proceedings Paper

Vacuum maintenance in hermetically sealed MEMs packages
Author(s): Alessio Corazza; Richard C. Kullberg
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Paper Abstract

Packages for many high sensitivity MEM devices (Micro- Electro-Mechanical devices) such as accelerometers need to operate in a vacuum in order to obtain their full performance. This vacuum is destroyed by the outgassing of species such as hydrogen and water vapor from the surfaces of the package exposed to this vacuum. To control this outgassing a getter is needed. MEM packages are too small to accommodate traditional sintered porous getters. A solution has been developed using a high porosity thick film getter material. The getter consists of a highly porous, mechanically stable, getter coating on a metal substrate. This getter reacts with active gases such as water vapor, hydrogen, oxygen, nitrogen, and carbon monoxide that outgas from the inner surfaces of the package. The physical characteristics and performance of this material will be demonstrated per ASTM sorption testing. The results of this testing will be used to demonstrate the potential for vacuum performance in a real world MEM package.

Paper Details

Date Published: 8 September 1998
PDF: 9 pages
Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323921
Show Author Affiliations
Alessio Corazza, SAES Getters SpA (Italy)
Richard C. Kullberg, SAES Getters USA, Inc. (United States)

Published in SPIE Proceedings Vol. 3514:
Micromachined Devices and Components IV
Patrick J. French; Kevin H. Chau, Editor(s)

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