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Proceedings Paper

Hybrid microdosing system
Author(s): Nam-Trung Nguyen; Stefan Richter; Jan Mehner; Steffen Schubert; Wolfram Doetzel; Thomas Gessner
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Paper Abstract

Based on an article in print this paper presents a hybrid assembled bi-directional micro dosing system for a water flow range of -40 (mu) l/min to 80 (mu) l/min. The system consists of a silicon micropump/valve chip (9 mm X 9 mm) and a silicon flow sensor (6 mm X 12 mm). The valve/pump can be driven by either a piezoelectric disk or an electrostatic actuator. Both, piezoelectric and electrostatic actuation for the pump/valve, the technology of each component and the hybrid assembling of the whole system are described. Results of transient numerical simulation of the pump and the mass flow sensor are presented and compared with experimental results. Descriptions of two different operational modes of the micro dosing system are given. The new pulse-width modulated control method for the actuator makes controlling the system easier. It allows an open-loop control of the pump rates without changing the driving frequency. All reported micropumps were driven by a square-wave signal which causes a relatively high noise level. In contrast to this, sawtooth and sinusoidal signals generate a smooth and quiet operation because of the small drag force on the fluid ports. Results of different driving methods are presented and compared.

Paper Details

Date Published: 8 September 1998
PDF: 9 pages
Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323917
Show Author Affiliations
Nam-Trung Nguyen, Chemnitz Univ. of Technology (Germany)
Stefan Richter, Chemnitz Univ. of Technology (Germany)
Jan Mehner, Chemnitz Univ. of Technology (Germany)
Steffen Schubert, Chemnitz Univ. of Technology (Germany)
Wolfram Doetzel, Chemnitz Univ. of Technology (Germany)
Thomas Gessner, Chemnitz Univ. of Technology (Germany)


Published in SPIE Proceedings Vol. 3514:
Micromachined Devices and Components IV
Patrick J. French; Kevin H. Chau, Editor(s)

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