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Proceedings Paper

Micromachined 2D array piezoelectrically actuated flextensional transducers: new designs
Author(s): Gokhan Percin; Butrus T. Khuri-Yakub
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Paper Abstract

In this article, we present micromachined 2D array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We manufacture the transducer in 2D arrays using planar silicon micromachining combined with reactive ion etching of bulk silicon to provide back access holes. Such an array could be combined with an on-board driving and an addressing circuitry.

Paper Details

Date Published: 8 September 1998
PDF: 4 pages
Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323916
Show Author Affiliations
Gokhan Percin, Stanford Univ. (United States)
Butrus T. Khuri-Yakub, Stanford Univ. (United States)

Published in SPIE Proceedings Vol. 3514:
Micromachined Devices and Components IV
Patrick J. French; Kevin H. Chau, Editor(s)

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