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Proceedings Paper

Micromachined gas detector based on self-aligned ionization tips
Author(s): Bahram Ghodsian; Marek Syrzycki; M. Parameswaran
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Paper Abstract

In this article, a micromachining technique is described which is an improvement to our previous technique. It allows metallic sharp and self-aligned tips to be fabricated for use as a gas detector. The fabrication technique has important advantages which makes it applicable to a wide variety application, in particular gas detection. These include simplicity and a low manufacturing cost. These tips were designed and fabricated with standard IC microfabrication technologies. However, the major highlight and achievement is the use of a low-resolution mask to position sharp tips very close to a second electrode in a simple self-aligned process. The detector exhibits a linear sensitivity response. The minimum-measured sensitivity of the detector, for the selected sample gas (CH3COOH), is 14 ppm and this was accomplished at a modest operating voltage of only 5 V. The voltage versus measured current of the detector, reveals a exponential behavior which indicates the field ionization to be responsible for detection process.

Paper Details

Date Published: 8 September 1998
PDF: 8 pages
Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323915
Show Author Affiliations
Bahram Ghodsian, Simon Fraser Univ. (Canada)
Marek Syrzycki, Simon Fraser Univ. (Canada)
M. Parameswaran, Simon Fraser Univ. (Canada)


Published in SPIE Proceedings Vol. 3514:
Micromachined Devices and Components IV
Patrick J. French; Kevin H. Chau, Editor(s)

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