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Proceedings Paper

MEMS-based resonating xylophone bar magnetometers
Author(s): Dennis K. Wickenden; Robert B. Givens; Robert Osiander; John L. Champion; Douglas A. Oursler; Thomas J. Kistenmacher
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Paper Abstract

A novel magnetometer which utilizes the Lorentz force to measure vector magnetic fields has recently been described. The device, based on a classical resonating xylophone bar, has an extremely wide dynamic range and is ideally suited to miniaturization using a variety of technologies. The overall dimensions of the xylophone bar are limited by the width of the nodal supports which act as current electrodes and ultimately govern the resonance qualities. Minimum xylophone lengths of 10 and 5 mm mare attainable by electrostatic discharge machining and chemical milling of metal foils, respectively. Significantly smaller devices are achievable using polycrystalline silicon-based MEMS processing. However, the sheet resistivity of the silicon restricts the drive current through the xylophone bar and thus limits the sensitivity. This sensitivity can potentially by regained by replacing the silicon xylophone bar with a metal/piezoelectric/metal sandwich structure.

Paper Details

Date Published: 8 September 1998
PDF: 9 pages
Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323908
Show Author Affiliations
Dennis K. Wickenden, Johns Hopkins Univ. (United States)
Robert B. Givens, Johns Hopkins Univ. (United States)
Robert Osiander, Johns Hopkins Univ. (United States)
John L. Champion, Johns Hopkins Univ. (United States)
Douglas A. Oursler, Johns Hopkins Univ. (United States)
Thomas J. Kistenmacher, Johns Hopkins Univ. (United States)

Published in SPIE Proceedings Vol. 3514:
Micromachined Devices and Components IV
Patrick J. French; Kevin H. Chau, Editor(s)

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