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Proceedings Paper

Micromachined inductive displacement sensor
Author(s): Thomas Velten; Peter Krause; D. Stefan; Ernst Obermeier
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Paper Abstract

In this paper a new concept for a micro coil for the realization of a displacement sensor or angular sensor is presented. The sensor consists of a 3D coil, consisting of two half coils and a movable iron core. Though the coil is fabricated by means of silicon bulk micromachining, it is possible to move an iron core through the coil without destroying the windings. The inductance of the coil is 0.25 (mu) H without core and 7.2 (mu) H with core. The ohmic resistance has a value of 60 (Omega) . The sensors developed are used in gesture recognition. For this application several micro coils are mounted on a data glove. The sensors have the task to measure the flexion of fingers.

Paper Details

Date Published: 8 September 1998
PDF: 8 pages
Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323906
Show Author Affiliations
Thomas Velten, Technical Univ. of Berlin (Germany)
Peter Krause, Technical Univ. of Berlin (Germany)
D. Stefan, Technical Univ. of Berlin (Germany)
Ernst Obermeier, Technical Univ. of Berlin (Germany)

Published in SPIE Proceedings Vol. 3514:
Micromachined Devices and Components IV
Patrick J. French; Kevin H. Chau, Editor(s)

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