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Proceedings Paper

Polysilicon for everything?
Author(s): M. C. L. Ward; Mark E. McNie; Robert J.T. Bunyan; David O. King; Roger Timothy Carline; Rebecca Wilson; J. P. Gillham
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Paper Abstract

We review some of the attractive attributes of microengineering and relate them to features of the highly successful silicon microelectronics industry. We highlight the need for cost effective functionality rather than ultimate performance as a driver for success and review key examples of polysilicon devices from this point of view. The effective exploitation of the data generated by the cost effective polysilicon sensors is also considered and we conclude that `non traditional' data analysis will need to be exploited if full use is to be made of polysilicon devices.

Paper Details

Date Published: 8 September 1998
PDF: 9 pages
Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323901
Show Author Affiliations
M. C. L. Ward, Defence Evaluation Research Agency Malvern (United Kingdom)
Mark E. McNie, Defence Evaluation Research Agency Malvern (United Kingdom)
Robert J.T. Bunyan, Defence Evaluation Research Agency Malvern (United Kingdom)
David O. King, Defence Evaluation Research Agency Malvern (United Kingdom)
Roger Timothy Carline, Defence Evaluation Research Agency Malvern (United Kingdom)
Rebecca Wilson, Defence Evaluation Research Agency Malvern (United Kingdom)
J. P. Gillham, Defence Evaluation Research Agency Malvern (United Kingdom)


Published in SPIE Proceedings Vol. 3514:
Micromachined Devices and Components IV
Patrick J. French; Kevin H. Chau, Editor(s)

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