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Proceedings Paper

Long-term stability of membrane transducers for proximity sensing
Author(s): Mark Hornung; Oliver Brand; Oliver Paul; Henry Baltes
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Paper Abstract

We report on the long-term stability of micromachined silicon membrane resonators for ultrasound based object detection and proximity sensing. The proximity sensor system measures distances up to 10 cm using either a phase or an acoustic Fabry-Perot measurement method. In these applications the transducer elements are continuously excited at their fundamental resonance using the thermomechanical excitation principle. The success of the sensor system depends on the reliability and stability of the micromachined devices, which are fabricated using an industrial pressure sensor process.

Paper Details

Date Published: 8 September 1998
PDF: 9 pages
Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323896
Show Author Affiliations
Mark Hornung, Swiss Federal Institute of Technology (Switzerland)
Oliver Brand, Swiss Federal Institute of Technology (Switzerland)
Oliver Paul, Albert-Ludwigs-Univ. Freiburg (Germany)
Henry Baltes, Swiss Federal Institute of Technology (Switzerland)


Published in SPIE Proceedings Vol. 3514:
Micromachined Devices and Components IV
Patrick J. French; Kevin H. Chau, Editor(s)

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