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Proceedings Paper

Wideband microwave switch by micromachining techniques
Author(s): Chienliu Chang; Peizen Chang; Kaihsiang Yen; Sheyshi Lu
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Paper Abstract

A micromachined microwave switch has been made on a semi- insulating GaAs substrate using a suspended membrane, gold coplanar waveguide (CPW), and electrostatic actuation as the switching mechanism. The electrostatic traction comes from the dc voltage applied between the ground of the CPW and the suspended membrane.

Paper Details

Date Published: 8 September 1998
PDF: 8 pages
Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); doi: 10.1117/12.323894
Show Author Affiliations
Chienliu Chang, National Taiwan Univ. (Taiwan)
Peizen Chang, National Taiwan Univ. (Taiwan)
Kaihsiang Yen, National Taiwan Univ. (Taiwan)
Sheyshi Lu, National Taiwan Univ. (Taiwan)


Published in SPIE Proceedings Vol. 3514:
Micromachined Devices and Components IV
Patrick J. French; Kevin H. Chau, Editor(s)

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