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Proceedings Paper

Solarization of AlF3-based fluoride glasses for VUV optics by ArF excimer laser irradiation
Author(s): Hideo Hosono; Tomoaki Ichimura; Masafumi Mizuguchi; Hiroshi Kawazoe; Yoshikane Shinkuma; Yuichi Watanabe; Tohru Ogawa
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Paper Abstract

Color center formation in AlF3-YF3-RF2 (R equals alkaline earth metal) glasses doped with PO2.5 (0 - 3 mol %) by irradiation with ArF excimer laser light was examined by optical absorption (vuv-visible) and electron paramagnetic resonance spectroscopies. Impurity iron ions and oxygens in the samples were 0.2 ppm and 440 ppm, respectively. Optical absorption ranging from 2 - 8 eV was induced via one-photon absorption processes. The optical band dominating the transmission loss at 193 nm has the peak at 5 eV in the P-free glasses or the peak at 6.9 eV in the doped glasses. The origins of the 5 ev-band and the 6.9-ev were tentatively ascribed to an oxygen-related hole center giving an EPR signal at g equals 2.0097 and PE'-center giving a hyperfine doublet with a separation of approximately 70 mT. The oscillator strengths of the 5-ev band and the 6.9-ev band were calculated as approximately 0.2 and approximately 0.13, the latter being close to that of Si E'-center. No formation of color centers associated with Al, Y, R and F ions was observed. The present results suggest that the reduction of impurity oxygen is a route to effectively suppress the solarization in the P-free AlF3-based glasses.

Paper Details

Date Published: 23 September 1998
PDF: 11 pages
Proc. SPIE 3424, Inorganic Optical Materials, (23 September 1998); doi: 10.1117/12.323760
Show Author Affiliations
Hideo Hosono, Tokyo Institute of Technology (Japan)
Tomoaki Ichimura, Science Univ. of Tokyo (Japan)
Masafumi Mizuguchi, Tokyo Institute of Technology (Japan)
Hiroshi Kawazoe, Tokyo Institute of Technology (Japan)
Yoshikane Shinkuma, HOYA Corp. (Japan)
Yuichi Watanabe, Science Univ. of Tokyo (Japan)
Tohru Ogawa, Semiconductor Leading Edge Technologies, Inc. (Japan)

Published in SPIE Proceedings Vol. 3424:
Inorganic Optical Materials
Alexander J. Marker III, Editor(s)

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