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Proceedings Paper

Color center formation and time-resolved photoluminescence for ArF excimer laser irradiation in CaF2 single crystals
Author(s): Masafumi Mizuguchi; Hideo Hosono; Hiroshi Kawazoe; Toru Ogawa
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Paper Abstract

Time-resolved photoluminescence spectra of various grade CaF2 single crystals were measured to examine effectiveness as a diagnosis for ArF excimer laser damage. Luminescence upon exciting with ArF laser light was classified into four bands from the peak position and lifetime, i.e., (1) 274 nm, 1 microsecond(s) , (2) 541 nm, 1 ms, (3) 418 nm, 700 ns, and (4) a doublet band 309 and 330 nm, 30 ns. Band 1 is emitted via 2-photon absorption processes and the origin is the relaxation of self-trapped exciton generated by band-to-band excitation. Therefore, this band is intrinsic to CaF2 crystals. On the other hand, the bands 2, 3 and 4 originate from trace impurities. Tb3+, Eu2+ and Ce3+, respectively. These luminescence bands occurred via on-photon absorption processes. When the band 2 (yellow green light) was clearly observed during the laser irradiation, the intense absorption band due to an F center associated with a trivalent yttrium ion was induced after prolonged irradiation. On the other hand, the band 3 (blue light) had no relationship with color center formation. It was suggested that photo-oxidation of trivalent rare earth ions has a correlation with color center formation.

Paper Details

Date Published: 23 September 1998
PDF: 11 pages
Proc. SPIE 3424, Inorganic Optical Materials, (23 September 1998); doi: 10.1117/12.323756
Show Author Affiliations
Masafumi Mizuguchi, Tokyo Institute of Technology (Japan)
Hideo Hosono, Tokyo Institute of Technology (Japan)
Hiroshi Kawazoe, Tokyo Institute of Technology (Japan)
Toru Ogawa, Semiconductor Leading Edge Technologies (Japan)

Published in SPIE Proceedings Vol. 3424:
Inorganic Optical Materials
Alexander J. Marker, Editor(s)

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