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Proceedings Paper

Design and fabrication of 128X128 diffractive microlens arrays for infrared focal plane arrays
Author(s): Yi Li; Xinjian Yi; Jianhua Hao
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Paper Abstract

128 X 128 diffractive microlens arrays have been designed by considering the independent optical and processing parameters for 3 - 5 micrometers wavelength with a microlens size of 100 micrometers . The lens F number and array pitch are 1.5 and 100 micrometers , respectively. The diffractive microlens arrays have been fabricated on the surface of Si substrates by successive photolithography and Ar+ ion-beam-etching technique. The practical processes and fabrication method are discussed. The optical characteristics and measurements of the diffractive microlens arrays are presented.

Paper Details

Date Published: 25 September 1998
PDF: 4 pages
Proc. SPIE 3545, International Symposium on Multispectral Image Processing (ISMIP'98), (25 September 1998); doi: 10.1117/12.323639
Show Author Affiliations
Yi Li, Huazhong Univ. of Science and Technology (China)
Xinjian Yi, Huazhong Univ. of Science and Technology (China)
Jianhua Hao, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 3545:
International Symposium on Multispectral Image Processing (ISMIP'98)
Ji Zhou; Anil K. Jain; Tianxu Zhang; Yaoting Zhu; Mingyue Ding; Jianguo Liu, Editor(s)

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