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Proceedings Paper

Fiber optic displacement sensor
Author(s): Pepe G. Davis; Jeff Bush; Gregory S. Maurer
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Paper Abstract

A novel low cost interferometric displacement sensor has been developed which tracks distance from the tip of a fiber optic probe. A unique interrogation technique is used which produces a 32-bit phase word, giving the system a dynamic range greater than 109. Therefore, a displacement resolution of less than 0.01 nm can be achieved with a full range of 6 mm. The measurement range can be extended beyond 10 m by simply adjusting the digital fringe counter and sacrificing resolution yet maintaining the greater than 109 dynamic range. Demodulation rates of 40 kHz have been achieved which facilitates dynamic measurements. Results from an application to hard disk (HD) profilometry are presented.

Paper Details

Date Published: 23 September 1998
PDF: 5 pages
Proc. SPIE 3489, Fourth Pacific Northwest Fiber Optic Sensor Workshop, (23 September 1998); doi: 10.1117/12.323427
Show Author Affiliations
Pepe G. Davis, Optiphase, Inc. (United States)
Jeff Bush, Optiphase, Inc. (United States)
Gregory S. Maurer, Raychem Corp. (United States)


Published in SPIE Proceedings Vol. 3489:
Fourth Pacific Northwest Fiber Optic Sensor Workshop
Chuck C. Jung; Eric Udd, Editor(s)

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