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Proceedings Paper

Aberrations of an optical system in the field heterodyne interferometer
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Paper Abstract

Heterodyne interferometry method for shape measurement based on the fringe projection is presented. Fringe pattern is displacing in the measurement field due to the interference of beams with slightly shifted frequencies. The phase difference of signals detected by matrix of detectors gives the information about the shape of surface under investigation. Phase measurement errors generated by imaging optical system are given.

Paper Details

Date Published: 29 September 1998
PDF: 6 pages
Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323369
Show Author Affiliations
Tomasz S. Tkaczyk, Warsaw Univ. of Technology (United States)
Romulad Jozwicki, Warsaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 3407:
International Conference on Applied Optical Metrology
Pramod Kumar Rastogi; Ferenc Gyimesi, Editor(s)

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