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Proceedings Paper

Grating diffraction for strain measurement in a microscope
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Paper Abstract

In this paper, a compact microscope system for direct strain measurement is presented. It involves the grating diffraction method coupled with microscopy and image processing technique. A Leitz optical transmitting microscope with white light source is reconstructed by developing a loading and recording system. Gratings with median density from 40 - 200 l/mm are used. With the help of a Bertrand lens, the Fourier spectrum of the grating, not the grating image is formed on the CCD sensor plane with high image quality. A software which can precisely, quickly and automatically determine the diffraction spot centroids is developed. The local strain is measured with high spatial resolution. A discussion on improving the sensitivity in multiple ways is suggested.

Paper Details

Date Published: 29 September 1998
PDF: 5 pages
Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323364
Show Author Affiliations
Bing Zhao, Ecole des Mines de Saint-Etienne (United States)
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 3407:
International Conference on Applied Optical Metrology
Pramod Kumar Rastogi; Ferenc Gyimesi, Editor(s)

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