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Proceedings Paper

Grating microinterferometer for local in-plane displacement/strain field analysis
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Paper Abstract

Micromechanical elements analysis require the local approach to their behavior and material constants. In the paper the automated grating microinterferometer GMI for in-plane displacement/strain measurement in a region smaller than 1 X 1 mm2 is presented. It is based on the concept of achromatic grating interferometer combined with glass block waveguide and designed for the work with standard optical microscopes. The interferogram obtained may be modified and design for both temporal and carrier frequency phase shifting methods. The methodology of measurement is described and the example of GMI application is given.

Paper Details

Date Published: 29 September 1998
PDF: 5 pages
Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323361
Show Author Affiliations
Leszek A. Salbut, Warsaw Univ. of Technology (Poland)
Malgorzata Kujawinska, Warsaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 3407:
International Conference on Applied Optical Metrology
Pramod Kumar Rastogi; Ferenc Gyimesi, Editor(s)

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