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Proceedings Paper

Determination of precise optical surface roughness parameters using ARS data
Author(s): Valentina V. Azarova; U. N. Lokhov; K. Malitsky
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Paper Abstract

The comparison of different methods of measuring surface roughness parameters, i.e. angle-resolved scattering (ARS) technique and atomic force microscope (AFM) profilometry, was performed for quartz precise optical surface, obtained by different polishing processes. The functions of power spectral density, calculated from ARS, using vector scattering theory, and from AFM data are in good agreement in the range of polar scatter angles 30..75 degrees. In this range the angular scattering is well predicted using the exponential autocorrelation function, with parameters, calculated from surface profile. The autocorrelation length, calculated from ARS data is above range using exponential statistics, remains practically constant for different surfaces, obtained by the same polishing process. The latter allows to consider it as the characteristic parameter of certain polishing process.

Paper Details

Date Published: 29 September 1998
PDF: 8 pages
Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323357
Show Author Affiliations
Valentina V. Azarova, Polyus (Russia)
U. N. Lokhov, Polyus (Russia)
K. Malitsky, MIPT (Russia)

Published in SPIE Proceedings Vol. 3407:
International Conference on Applied Optical Metrology
Pramod Kumar Rastogi; Ferenc Gyimesi, Editor(s)

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