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Proceedings Paper

Scanning optical microscopy and its applications to nondestructive materials testing
Author(s): Peter Torok; L. Mule Stagno
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Paper Abstract

In this work we discuss the applications of confocal microscopy to non-destructive materials testing. After the introduction we briefly consider some important theoretical aspects of the microscope. We then move to discuss the possible imaging modes available for both surface and bulk microscopy. We present experimental images obtained with various types of imaging modes. Finally, an experimental confirmation for the theoretically predicted contrast mechanism is discussed.

Paper Details

Date Published: 29 September 1998
PDF: 5 pages
Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323349
Show Author Affiliations
Peter Torok, Univ. of Oxford (United Kingdom)
L. Mule Stagno, MEMC Electronic Materials Inc. (United States)

Published in SPIE Proceedings Vol. 3407:
International Conference on Applied Optical Metrology
Pramod Kumar Rastogi; Ferenc Gyimesi, Editor(s)

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