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Proceedings Paper

Near-field optical metrology
Author(s): Michel Spajer
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Paper Abstract

The relations of Near Field Optics with Metrology are of two kinds. First, it shifts the resolution limit towards the nanometer scale. This improvement is due to a strong interaction between the probe and the sample and its consequence for the quantitative interpretation is a non- linear relation between the image and the object. Secondly, Near Field Optics uses some of the classical detection methods of metrology such as heterodyne interferometry and image processing.

Paper Details

Date Published: 29 September 1998
PDF: 7 pages
Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323341
Show Author Affiliations
Michel Spajer, Univ. de Franche-Comte (France)

Published in SPIE Proceedings Vol. 3407:
International Conference on Applied Optical Metrology
Pramod Kumar Rastogi; Ferenc Gyimesi, Editor(s)

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