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Proceedings Paper

Holographic microscopic interferometry with respect to the estimation of stress and strain in micro-opto-electro-mechanical systems (MOEMS)
Author(s): Guenther K.G. Wernicke; Oliver Kruschke; Nazif Demoli; Hartmut Gruber
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Paper Abstract

Holographic microscopy with conjugate reconstruction for the interferometric determination of three-dimensional displacement was used for the investigation of the mechanical behavior of micromechanic and microelectronic components. An experimental set-up for the exposure of the holographic interferograms was used for the application of the spatial heterodyne technique, for the application of phase shifting, and for electro-optic holography. Three holograms for different illumination directions recorded on one holographic plate are reconstructed conjugately, and spatial heterodyne technique a well as phase shift technique were used to evaluate the interferograms. Only by conjugated reconstruction it is possible to obtain a perfectly optimized interferometer for the static evaluation method. The evaluation of interferograms which are strongly disturbed by speckle noise can be performed successfully. A comparison of the results of the application of both techniques is given. The influence of the speckle effect on the resolution was investigated.

Paper Details

Date Published: 29 September 1998
PDF: 7 pages
Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323339
Show Author Affiliations
Guenther K.G. Wernicke, Humboldt Univ. of Berlin (Germany)
Oliver Kruschke, Humboldt Univ. of Berlin (Germany)
Nazif Demoli, Univ. of Zagreb (Croatia)
Hartmut Gruber, Humboldt Univ. of Berlin (Germany)

Published in SPIE Proceedings Vol. 3407:
International Conference on Applied Optical Metrology
Pramod Kumar Rastogi; Ferenc Gyimesi, Editor(s)

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