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Proceedings Paper

Shear ESPI with small objects
Author(s): Rajpal S. Sirohi; Cho Jui Tay; Huai Min Shang; W. P. Boo
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Paper Abstract

Shear ESPI has been applied for the NDT of objects under magnification. A method to obtain the thickness of the defect (assumed to be circular diaphragm on a rigid boundary) from the Shear ESPI data is presented. Experiments conducted on programmed defects establish the validity of the procedure; and thickness estimates with less than 10% departure from the nominal values are obtained.

Paper Details

Date Published: 29 September 1998
PDF: 6 pages
Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323336
Show Author Affiliations
Rajpal S. Sirohi, National Univ. of Singapore (India)
Cho Jui Tay, National Univ. of Singapore (Singapore)
Huai Min Shang, National Univ. of Singapore (Singapore)
W. P. Boo, National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 3407:
International Conference on Applied Optical Metrology
Pramod Kumar Rastogi; Ferenc Gyimesi, Editor(s)

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