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Proceedings Paper

Digital shearography for slope measurement
Author(s): Huai Min Shang; Y. M. He; Cho Jui Tay
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Paper Abstract

This paper presents an electronic speckle shearing interferometry optical method for the full field measurement of the slope of an object. The object under study is placed on a rotatable platform and illuminated by an expanded laser beam. Its image is recorded by a shearing CCD camera and stored directly into a computer. By recording the two images before and after giving the object a small angle of rotation, the resulting correlation fringe pattern which represents the object surface slope can be obtained. Theory of the new method and some experimental results are presented.

Paper Details

Date Published: 29 September 1998
PDF: 6 pages
Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323331
Show Author Affiliations
Huai Min Shang, National Univ. of Singapore (Singapore)
Y. M. He, Huazhong Univ. of Science and Technology (China)
Cho Jui Tay, National Univ. of Singapore (Singapore)

Published in SPIE Proceedings Vol. 3407:
International Conference on Applied Optical Metrology
Pramod Kumar Rastogi; Ferenc Gyimesi, Editor(s)

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