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Proceedings Paper

Multiwavelength ATR reflectometry of thin films
Author(s): A. Hoffmann; Norbert Kroo; Z. Lenkefi; Zsolt Szentirmay
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Paper Abstract

Optical parameters of metallic and non-metallic thin films (complex dielectric function and the thickness) can be determined by measurement of the attenuated total reflection (ATR) of light. In this method the first layer should be a surface-plasmon-carrying metal film as e.g. silver or gold, while the 100 - 200 angstrom thick adlayers could be both metallic or non-metallic. The basic unit of our newly developed multichannel reflectometer is a conventional ATR reflectometer, working in the Kretschmann geometry. The light source is a white lamp unit and the analysis of the reflected beam is performed using an OMA-4 multichannel optical analyzer. This instrument makes possible the determination of the angular distribution of reflectance of thin film samples in the 400 - 900 nm wavelength range in one cycle.

Paper Details

Date Published: 29 September 1998
PDF: 6 pages
Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323321
Show Author Affiliations
A. Hoffmann, Research Institute for Solid State Physics and Optics (Hungary)
Norbert Kroo, Research Institute for Solid State Physics and Optics (Hungary)
Z. Lenkefi, Research Institute for Solid State Physics and Optics (Hungary)
Zsolt Szentirmay, Research Institute for Solid State Physics and Optics (Hungary)


Published in SPIE Proceedings Vol. 3407:
International Conference on Applied Optical Metrology

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