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Proceedings Paper

Surface profilometry by wavelength scanning interferometry
Author(s): Ichirou Yamaguchi; Akihiro Yamamoto; Masaru Yano
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Paper Abstract

Parallel and absolute measurement of surface profiles are realized on objects including diffuse surfaces and discontinuities such as steps and holes. Sensitivity and range of measurements have been examined by using a dye laser with tuning range of 4.2 nm. Their dependences on axial positions and tilt angle are investigated experimentally for diffuse objects and milled ones. A narrow dip and a screw head that cannot be measured by other methods could be analyzed by the present method.

Paper Details

Date Published: 29 September 1998
PDF: 6 pages
Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); doi: 10.1117/12.323305
Show Author Affiliations
Ichirou Yamaguchi, RIKEN--The Institute of Physical and Chemical Research (Japan)
Akihiro Yamamoto, RIKEN--The Institute of Physical and Chemical Research (Japan)
Masaru Yano, Saitama Univ. (Japan)


Published in SPIE Proceedings Vol. 3407:
International Conference on Applied Optical Metrology
Pramod Kumar Rastogi; Ferenc Gyimesi, Editor(s)

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