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Proceedings Paper

Intercomparison of phase shifts in interferometric gauge block calibration
Author(s): Mikael Frennberg; Reine Johansson; Jes Henningsen; Steen-Ulrik Ipsen; Bitten Poulsen; Helge Karlsson; Heikki Lehto
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Paper Abstract

A comparison of phase correction measurements by the stack method and by roughness measurements has been performed by the National Metrology Institutes of Sweden, Denmark, Norway and Finland. For a given technique the agreement between the participants is good, but the roughness measurements give consistently lower results for the phase correction than the stack method. This may be due to a systematic error in the stack results, originating from form errors.

Paper Details

Date Published: 30 September 1998
PDF: 5 pages
Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); doi: 10.1117/12.323120
Show Author Affiliations
Mikael Frennberg, Swedish National Testing and Research Institute (Sweden)
Reine Johansson, Swedish National Testing and Research Institute (Sweden)
Jes Henningsen, Danish Institute of Fundamental Metrology (Denmark)
Steen-Ulrik Ipsen, Danish Institute of Fundamental Metrology (Denmark)
Bitten Poulsen, Danish Institute of Fundamental Metrology (Denmark)
Helge Karlsson, Norwegian Metrology and Accreditation Service (Norway)
Heikki Lehto, VTT Manufacturing Technology (Finland)


Published in SPIE Proceedings Vol. 3477:
Recent Developments in Optical Gauge Block Metrology
Jennifer E. Decker; Nicholas Brown, Editor(s)

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