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Proceedings Paper

Uncertainties in the measurement of gauge blocks by interferometry
Author(s): Yu-Pin Lan; Wei-Cheng Chang
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Paper Abstract

The uncertainties in the measurement of gauge blocks by interferometry based on the official publication of the ISO 'Guide to the Expression of Uncertainty in Measurement', are evaluated. The effects caused by a variety of factors such as laser frequency, refractive index of air, temperature and wringing film thickness are analyzed. The evaluation results how that for steel gauge blocks of grade 00, the expanded uncertainty is 0.04 micrometers + 14 X 10-7L where L is the length of the gauge block. The reported uncertainty is based on a standard uncertainty multiplied by a coverage factor of k equals 1.96, which provides a level of confidence of 95 percent.

Paper Details

Date Published: 30 September 1998
PDF: 8 pages
Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); doi: 10.1117/12.323114
Show Author Affiliations
Yu-Pin Lan, Industrial Technology Research Institute (Taiwan)
Wei-Cheng Chang, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 3477:
Recent Developments in Optical Gauge Block Metrology
Jennifer E. Decker; Nicholas Brown, Editor(s)

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