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Proceedings Paper

Phase correction in measurement of gauge blocks using a new double-ended interferometer
Author(s): Yasushi Ishii
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Paper Abstract

Phase correction in measured lengths of gauge blocks was researched. It has been known that the phase correction depends on the surface roughens of the gauge and the shift of the effective plane of reflection caused by penetration, due to the complex refractive index.

Paper Details

Date Published: 30 September 1998
PDF: 8 pages
Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); doi: 10.1117/12.323106
Show Author Affiliations
Yasushi Ishii, Japan Quality Assurance Organization (Japan)


Published in SPIE Proceedings Vol. 3477:
Recent Developments in Optical Gauge Block Metrology
Jennifer E. Decker; Nicholas Brown, Editor(s)

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