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Proceedings Paper

Interferometer for long gauge blocks up to 1000 mm and its measurement uncertainty
Author(s): Tatsuya Narumi; Yoshio Saruki; Taizo Nakamura; Shunji Shutoh; Masaji Sawabe
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Paper Abstract

It is difficult to measure efficiently long gauge blocks by the interferometric method because long time is necessary for temperature run-in of long gauge blocks. The interferometer which can measure long gauge blocks up to 1000 mm has been developed by Mitutoyo Corporation. This interferometer is constructed with the optical system which can measure four gauge blocks one after another setting them once. The optical system of this interferometer can be easily adjusted and comparison measurements of gauge blocks by interferometry is also possible. As its light source, isotope lam p and laser are used. When the laser used, it is possible to measure directly 1000 mm. The uncertainty in measurement with this interferometer is evaluated as U equals 0.225 micrometers (k equals 2) for the case of 1000 mm long gauge block.

Paper Details

Date Published: 30 September 1998
PDF: 6 pages
Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); doi: 10.1117/12.323093
Show Author Affiliations
Tatsuya Narumi, Mitutoyo Corp. (Japan)
Yoshio Saruki, Mitutoyo Corp. (Japan)
Taizo Nakamura, Mitutoyo Corp. (Japan)
Shunji Shutoh, Mitutoyo Corp. (Japan)
Masaji Sawabe, Mitutoyo Corp. (Japan)

Published in SPIE Proceedings Vol. 3477:
Recent Developments in Optical Gauge Block Metrology
Jennifer E. Decker; Nicholas Brown, Editor(s)

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