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Proceedings Paper

MEMS-based microfluidic system for chromatographic analysis of liquid samples
Author(s): Nevenka C. Golubovic; Qinghua Kang; H. Thurman Henderson; Neville Pinto
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Paper Abstract

A complete micro-chromatographic system has been designed on a (110) silicon chip and the column-detector sub-system has been demonstrated. This micro-configuration allows the active surface-to-cross sectional area to be maximized, consistent with fabrication and pressure drop issues. A separation column was designed as an array of parallel channels anisotropically etched in (110) silicon to reduce pressure drop and to provide a necessary large surface area at a short length. Sensing was done by use of integrated impedance electrodes, with the detector cell volume less than 1 nl, although integrated optical detection has also been initiated. The response time is improved by about two orders of magnitude (relative to traditional systems) and simultaneous multiple analysis capability is realized with this design. Fabrication of multiple impedance detectors at different locations along the length of a micro-channel will enable monitoring of the separation in progress. Although the present work supports only a linear column configuration, a serpentine version would consume only about one square millimeter of a chip area, thus further minimizing the device.

Paper Details

Date Published: 10 September 1998
PDF: 8 pages
Proc. SPIE 3515, Microfluidic Devices and Systems, (10 September 1998); doi: 10.1117/12.322099
Show Author Affiliations
Nevenka C. Golubovic, Univ. of Cincinnati (United States)
Qinghua Kang, Univ. of Cincinnati (United States)
H. Thurman Henderson, Univ. of Cincinnati (United States)
Neville Pinto, Univ. of Cincinnati (United States)


Published in SPIE Proceedings Vol. 3515:
Microfluidic Devices and Systems
A. Bruno Frazier; Chong Hyuk Ahn, Editor(s)

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