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Proceedings Paper

Microfluidic devices for μ-TAS applications fabricated by polymer hot embossing
Author(s): Holger Becker; Wolfram Dietz
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Paper Abstract

Polymer microfabrication methods are becoming increasingly important as low-cost alternatives to the silicon or glass- based MEMS technologies. We present in this paper hot embossing as a replication method for planar microstructures based on polymer substrates. Several chips containing microchannels for capillary electrophoresis applications with a range of channel widths between 0.8 micrometers and 100 micrometers have been produced by this method, yielding a very good structural replication and short production times.

Paper Details

Date Published: 10 September 1998
PDF: 6 pages
Proc. SPIE 3515, Microfluidic Devices and Systems, (10 September 1998); doi: 10.1117/12.322081
Show Author Affiliations
Holger Becker, Jenoptik Mikrotechnik GmbH (Germany)
Wolfram Dietz, Jenoptik Mikrotechnik GmbH (Germany)

Published in SPIE Proceedings Vol. 3515:
Microfluidic Devices and Systems
A. Bruno Frazier; Chong Hyuk Ahn, Editor(s)

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