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Proceedings Paper

Micropump for viscous liquids and muds
Author(s): Norbert Schwesinger; Sasha Bechtel
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Paper Abstract

This work was focused on the development of a micropump that allows the transport of fluids with high viscosities or fluids containing pigments in a large amount. This new pump should be produced by means of silicon micromachining technologies. Due to adhesion forces as well as sedimentation processes the transport of highly viscous and particle loaded fluids is a difficult problem. Dead volumes must be surely avoided in the pump because they are preferred regions of adhesion and sedimentation, respectively. The developed micropump is nearly free of dead volumes. It consists of silicon chips and a PTFE-membrane bonded together without real gluing procedures. The silicon chips contain deep etched structures manufactured by simple wet chemical etching procedures. Pressure on the liquid can be generated inside the structures by pushing the elastic membrane. A pneumatic drive was used to deflect the membranes. In a peristaltic mode it was possible to pump liquids like honey or mustard with a noticeable flow rat up to 0.6 ml/min without any back flow.

Paper Details

Date Published: 10 September 1998
PDF: 6 pages
Proc. SPIE 3515, Microfluidic Devices and Systems, (10 September 1998); doi: 10.1117/12.322080
Show Author Affiliations
Norbert Schwesinger, Technical Univ. of Ilmenau (Germany)
Sasha Bechtel, Hoefer & Bechtel Industrieausruestungen GmbH (Germany)

Published in SPIE Proceedings Vol. 3515:
Microfluidic Devices and Systems
A. Bruno Frazier; Chong Hyuk Ahn, Editor(s)

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