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Proceedings Paper

Coherent macro porous silicon as a wick structure in an integrated microfluidic two-phase cooling system
Author(s): Alexander Holke; Jorg Pilchowski; H. Thurman Henderson; Ahed Saleh; Michael Kazmierczak; Frank M. Gerner; Karl Baker
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Paper Abstract

This paper reports a new concept of building a coherent porous wick structure in planar silicon wafers for capillary pumping in Loop Heat Pipes (LHPs). By utilizing Macro Porous Silicon (MPS) fabrication technology, with pore sizes in the order of a micron, precise control of the pore dimensions of the wick is possible. In addition, by using MEMS (Micro Electro Mechanical Systems) fabrication technology, LHPs can ultimately be integrated into electronic packaging systems, or indeed into the silicon microchips themselves. The MPS samples were fabricated and tested for capillary pressure and permeability. The test results closely matched the analytical models that were derived from basic physics.

Paper Details

Date Published: 10 September 1998
PDF: 9 pages
Proc. SPIE 3515, Microfluidic Devices and Systems, (10 September 1998); doi: 10.1117/12.322077
Show Author Affiliations
Alexander Holke, Univ. of Cincinnati (United States)
Jorg Pilchowski, Univ. of Cincinnati (United States)
H. Thurman Henderson, Univ. of Cincinnati (United States)
Ahed Saleh, Univ. of Cincinnati (United States)
Michael Kazmierczak, Univ. of Cincinnati (United States)
Frank M. Gerner, Univ. of Cincinnati (United States)
Karl Baker, NASA Lewis Research Ctr. (United States)

Published in SPIE Proceedings Vol. 3515:
Microfluidic Devices and Systems
A. Bruno Frazier; Chong Hyuk Ahn, Editor(s)

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