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Proceedings Paper

Method of evaluating and tolerancing interferometer designs
Author(s): Paul F. Michaloski; Andrew W. Kulawiec; Jon Fleig
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Paper Abstract

A ray tracing method of simulating interferometers from source to detector using standard optical design software is presented. The advantages, disadvantages and limitations of the method are discussed. The method is applied to the analysis of a phase measuring interferometer designed to test the form of cylindrical mechanical parts and the predicted performance is compared with experimental results.

Paper Details

Date Published: 21 September 1998
PDF: 9 pages
Proc. SPIE 3482, International Optical Design Conference 1998, (21 September 1998); doi: 10.1117/12.322054
Show Author Affiliations
Paul F. Michaloski, Tropel Corp. (United States)
Andrew W. Kulawiec, Tropel Corp. (United States)
Jon Fleig, Tropel Corp. (United States)

Published in SPIE Proceedings Vol. 3482:
International Optical Design Conference 1998
Leo R. Gardner; Kevin P. Thompson, Editor(s)

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