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Proceedings Paper

High-precision testing of optical components
Author(s): Bernd Doerband
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Paper Abstract

High quality lenses have reached a standarad where wavefront tolerances of a few nanometers for transmission and surface figure of individual components are necessary. The standard measuring tool in production is digital interferometry. To satisfy the demands of current and future production quality interferometruc equipment has to provide an overall accuracy below one nanometer under fabrication environment. This is reasonable, especially if "work man's rule" is applied demanding a tolerance/accuracy factor for metrology of ≥10:1. In this paper the limitations on interferometry for material and surface inspection as well as possible improvements are discussed.

Paper Details

Date Published: 21 September 1998
PDF: 6 pages
Proc. SPIE 3482, International Optical Design Conference 1998, (21 September 1998); doi: 10.1117/12.322052
Show Author Affiliations
Bernd Doerband, Carl Zeiss (Germany)


Published in SPIE Proceedings Vol. 3482:
International Optical Design Conference 1998
Leo R. Gardner; Kevin P. Thompson, Editor(s)

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