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Proceedings Paper

Interferometer system scheme for the fast measurement of small displacement
Author(s): Ruiming Li; Tadashi Aruga
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Paper Abstract

An interferometer system scheme is proposed. This system consists of two Michelson interferometers and two laser sources and requires no use of modulation technique. Within a displacement range of about 10 microns, it is expected that the absolute displacement can be measured with a very high speed without the phase ambiguity problem. The possibility is demonstrated by numerical analysis.

Paper Details

Date Published: 21 September 1998
PDF: 6 pages
Proc. SPIE 3482, International Optical Design Conference 1998, (21 September 1998); doi: 10.1117/12.322034
Show Author Affiliations
Ruiming Li, Communications Research Lab. (Japan)
Tadashi Aruga, Communications Research Lab. (Japan)

Published in SPIE Proceedings Vol. 3482:
International Optical Design Conference 1998
Leo R. Gardner; Kevin P. Thompson, Editor(s)

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