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Proceedings Paper

Microscanning system for laser applications
Author(s): Jan Bechtle; H. Grateau; Pierre Labeye; P. Bezesty; Karine Petroz
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Paper Abstract

We have developed an integrated system for laser beam deflection, using a monolithic silica on silicon structure including microlenses and an electromechanical actuator. The scanner shows a maximum deflection angle of +/- 5 degree(s) for a static Voltage of about 130 V or continuous scanning of a field of 20 degree(s) for a 45 V signal at the resonance frequency. The device is fabricated by a surface micromachining process of a silica layer on silicon substrate with no subsequent assembling steps involved.

Paper Details

Date Published: 21 September 1998
PDF: 6 pages
Proc. SPIE 3482, International Optical Design Conference 1998, (21 September 1998); doi: 10.1117/12.321987
Show Author Affiliations
Jan Bechtle, LETI/CEA (France)
H. Grateau, LETI/CEA (France)
Pierre Labeye, LETI/CEA (France)
P. Bezesty, LETI/CEA (France)
Karine Petroz, LETI/CEA (France)


Published in SPIE Proceedings Vol. 3482:
International Optical Design Conference 1998
Leo R. Gardner; Kevin P. Thompson, Editor(s)

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