Share Email Print

Proceedings Paper

Microscanning system for laser applications
Author(s): Jan Bechtle; H. Grateau; Pierre Labeye; P. Bezesty; Karine Petroz
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We have developed an integrated system for laser beam deflection, using a monolithic silica on silicon structure including microlenses and an electromechanical actuator. The scanner shows a maximum deflection angle of +/- 5 degree(s) for a static Voltage of about 130 V or continuous scanning of a field of 20 degree(s) for a 45 V signal at the resonance frequency. The device is fabricated by a surface micromachining process of a silica layer on silicon substrate with no subsequent assembling steps involved.

Paper Details

Date Published: 21 September 1998
PDF: 6 pages
Proc. SPIE 3482, International Optical Design Conference 1998, (21 September 1998); doi: 10.1117/12.321987
Show Author Affiliations
Jan Bechtle, LETI/CEA (France)
H. Grateau, LETI/CEA (France)
Pierre Labeye, LETI/CEA (France)
P. Bezesty, LETI/CEA (France)
Karine Petroz, LETI/CEA (France)

Published in SPIE Proceedings Vol. 3482:
International Optical Design Conference 1998
Leo R. Gardner; Kevin P. Thompson, Editor(s)

© SPIE. Terms of Use
Back to Top