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Proceedings Paper

Design and simulation of advanced surface micromachined micromirror devices for telescope adaptive optics applictions
Author(s): M. Adrian Michalicek; Natalie Clark; John H. Comtois; Heather K. Schriner
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Paper Abstract

This paper describes the design, fabrication, modeling, surface characterization, and simulation of advanced surface micromachined micromirror devices that are optimized for adaptive optics applications. Design considerations and fabrication capabilities are presented. Simulation of adaptive optics performance of unique Flexure-Beam and Axial-Rotation Micromirror devices is performed for many common aberrations. These devices are fabricated in the state-of-the-art four-level planarized polysilicon process available at Sandia National Laboratories known as the Sandia Ultra-planar Multi-level planarized MEMS Technology. This enabling process permits the development of micromirror devices with near-ideal characteristics that have previously been unrealizable in standard three-layer polysilicon processes. This paper describes such characteristics as elevated address electrodes, array wiring techniques, planarized mirror surfaces using chemical mechanical polishing, unique post-process metallization, and the best active surface area to date.

Paper Details

Date Published: 11 September 1998
PDF: 11 pages
Proc. SPIE 3353, Adaptive Optical System Technologies, (11 September 1998); doi: 10.1117/12.321697
Show Author Affiliations
M. Adrian Michalicek, Air Force Research Lab. (United States)
Natalie Clark, Air Force Research Lab. (United States)
John H. Comtois, Air Force Research Lab. (United States)
Heather K. Schriner, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 3353:
Adaptive Optical System Technologies
Domenico Bonaccini; Robert K. Tyson, Editor(s)

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