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Proceedings Paper

Characterization of amorphous carbon films grown by pulsed laser deposition
Author(s): Michael P. Siegal; Luz J. Martinez-Miranda; N. John DiNardo; David R. Tallant; John Charles Barbour; Paula Newcomer Provencio
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Paper Abstract

Amorphous carbon (a-C) films grow via energetic processes such as pulsed-laser deposition (PLD). The cold-cathode electron emission properties of a-C are promising for flat-panel display and vacuum microelectronics technologies. These ultrahard films consist of a mixture of 3-fold and 4-fold coordinated carbon atoms, resulting in an amorphous material with 'diamond-like' properties. We study the structures of a-C films grown at room temperature as a function of PLD energetics using x-ray reflectivity, Raman spectroscopy, high- resolution transmission electron microscopy, and Rutherford backscattering spectrometry. While an understanding of the electron emission mechanism in a-C films remains elusive, the onset of emission is typically preceded by 'conditioning' where the material is stressed by an applied electric field. To simulate conditioning assess its effect, we use the spatially-localized field and current of a scanning tunneling microscope tip. Scanning force microscopy shows that conditioning alters surface morphology and electronic structure. Spatially-resolved electron energy loss spectroscopy indicates that the predominant bonding configuration changes from predominantly 4-fold to 3-fold coordination.

Paper Details

Date Published: 14 September 1998
PDF: 10 pages
Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); doi: 10.1117/12.321617
Show Author Affiliations
Michael P. Siegal, Sandia National Labs. (United States)
Luz J. Martinez-Miranda, Univ. of Maryland/College Park (United States)
N. John DiNardo, Drexel Univ. (United States)
David R. Tallant, Sandia National Labs. (United States)
John Charles Barbour, Sandia National Labs. (United States)
Paula Newcomer Provencio, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 3343:
High-Power Laser Ablation
Claude R. Phipps, Editor(s)

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