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Proceedings Paper

Scaling of a Q-switch CO2 laser for pulsed laser deposition
Author(s): Andreas Husmann; Markus Niessen; Frank Gruembel; Ernst-Wolfgang Kreutz; Reinhart Poprawe
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Paper Abstract

In Pulsed Laser Deposition the laser parameters pulse duration, repetition rate, and average output power are important parameters for control of the resulting film properties. In order to obtain high deposition and coverage rates the use of powerful laser radiation sources is required. A new approach is the use of Q-switch CO2 lasers, making accessible the range of kW average output powers for PLD. A common industrial fast axial gas flow rf-excited CO2-laser is equipped with a mechanical Q-switch assembly. The characteristic properties of this laser radiation source are studied by measurements of the average output power and of the spatial and temporal intensity distribution of the laser radiation. Results show, that the laser operates in multimode or in TEM10 mode depending on the use of apertures in the resonator. Variation of the electrical rf-excitation (in synchronization with the Q-switch) influences the pulse duration and shape, repetition rate, and average output power. Based on the experimental findings model calculations are carried out, in order to predict the pulse energy and average output power of the laser radiation source, when operating with different Q-switch parameters, e.g. higher repetition rates.

Paper Details

Date Published: 14 September 1998
PDF: 10 pages
Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); doi: 10.1117/12.321599
Show Author Affiliations
Andreas Husmann, Rheinisch-Westfalische Technische Hochschule Aachen (Germany)
Markus Niessen, Rheinisch-Westfalische Technische Hochschule Aachen (Germany)
Frank Gruembel, Univ.-Gesamthochschule Siegen (Germany)
Ernst-Wolfgang Kreutz, Rheinisch-Westfalische Technische Hochschule Aachen (Germany)
Reinhart Poprawe, Rheinisch-Westfalische Technische Hochschule Aachen (Germany)


Published in SPIE Proceedings Vol. 3343:
High-Power Laser Ablation
Claude R. Phipps, Editor(s)

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