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Proceedings Paper

1-kW industrial excimer laser (308-nm)
Author(s): John C.M. Timmermans
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Paper Abstract

The short wavelength of excimer lasers offers advantages for industrial applications such as cutting, drilling surface treatment and annealing. At NCLR a 1 kW (1 J, 1 kHz) XeCl- laser is under development. This laser has several advantages above commercial excimer lasers that enables it to go to the high average power of 1 kW combined with an excellent beam quality.

Paper Details

Date Published: 14 September 1998
PDF: 5 pages
Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); doi: 10.1117/12.321592
Show Author Affiliations
John C.M. Timmermans, Nederlands Centrum voor Laser Research BV (Netherlands)


Published in SPIE Proceedings Vol. 3343:
High-Power Laser Ablation
Claude R. Phipps, Editor(s)

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