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Comparative study of laser-assisted removal and transfer in the deposition of Al2O3 and ZrO2 thin films for different pulse duration
Author(s): Ernst-Wolfgang Kreutz; Mirka Alunovic; Holger Stamm
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Paper Abstract

Investigations of material transfer comparatively has been carried out using micro- to nano second laser-assisted removal of ceramics (Al2O3, ZrO2) onto different substrates (steel, Si) for various laser parameters (wavelength, pulse energy, repetition rate, fluence) and processing variables (processing gas properties, target- substrate-distance). The transfer of the material was examined by high-speed photography, beam deflection, and optical spectroscopy. The experimental results, which are related to theoretical ones, are discussed in view of applications.

Paper Details

Date Published: 14 September 1998
PDF: 9 pages
Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); doi: 10.1117/12.321579
Show Author Affiliations
Ernst-Wolfgang Kreutz, Technical Univ. Aachen (Germany)
Mirka Alunovic, Technical Univ. Aachen (Germany)
Holger Stamm, Technical Univ. Aachen (Germany)

Published in SPIE Proceedings Vol. 3343:
High-Power Laser Ablation
Claude R. Phipps, Editor(s)

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