Proceedings PaperIndustrial applications of pulsed lasers to materials microprocessing
|Format||Member Price||Non-Member Price|
|GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free.||Check Access|
The use of pulsed lasers for microprocessing material in several manufacturing industries is presented. Deep-uv photolithography, via hole and ink jet printer nozzle microdrilling, solar panel thin film scribing, texturing of hard disks, annealing amorphous silicon in flat panel displays, fiber Bragg grating production and micro-electro- mechanical system (MEMS) fabrication applications are discussed.