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Proceedings Paper

Industrial applications of pulsed lasers to materials microprocessing
Author(s): Malcolm C. Gower
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Paper Abstract

The use of pulsed lasers for microprocessing material in several manufacturing industries is presented. Deep-uv photolithography, via hole and ink jet printer nozzle microdrilling, solar panel thin film scribing, texturing of hard disks, annealing amorphous silicon in flat panel displays, fiber Bragg grating production and micro-electro- mechanical system (MEMS) fabrication applications are discussed.

Paper Details

Date Published: 14 September 1998
PDF: 12 pages
Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); doi: 10.1117/12.321564
Show Author Affiliations
Malcolm C. Gower, Exitech, Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 3343:
High-Power Laser Ablation
Claude R. Phipps, Editor(s)

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