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Proceedings Paper

Real-time high-resolution absolute distance measurement by two-wavelength interferometry using superheterodyne detection
Author(s): Toshiyuki Yokoyama; Tsutomu Araki; Shuko Yokoyama; Norihito Suzuki
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Paper Abstract

A new method of high-resolution two-wavelength interferometry was proposed for real-time and absolute measurement of micron-order distance or step-shapes in the depth. Simultaneous phase measurement of synthetic wavelength and one of two wavelengths was executed to measure the distance in the range of synthetic wavelength with interferometric resolution. A heterodyne light source constructed of two longitudinal modes was also proposed. The intermode beat of two modes was used as heterodyne career. Experiments were done with He-Ne lasers of 633 nm and 544/612 nm to measure 3 - 18 micrometers range.

Paper Details

Date Published: 19 August 1998
PDF: 4 pages
Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); doi: 10.1117/12.321021
Show Author Affiliations
Toshiyuki Yokoyama, Osaka Univ. (Japan)
Tsutomu Araki, Osaka Univ. (Japan)
Shuko Yokoyama, Japan Micro-Optics Co. (Japan)
Norihito Suzuki, Osaka Electro Communication Univ. (Japan)


Published in SPIE Proceedings Vol. 3573:
OPTIKA '98: 5th Congress on Modern Optics
Gyorgy Akos; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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